WET BENCH HALF AUTO WET CLEAN BENCH
TUBE CLEANER PARTS CLEANER
DI-WATER HEATER AUTOMATIC ORGANIC STRIP BENCH SPECIFICATION
 
 
  Loade r Chemical DIW Unloader
  240014302700mm(WDH)
 
* Generals
1. Main Purpose : This is automatic cleaning device of quartz tools which are used in CVD & diffusion
   process chamber
2. Size of tube : 4~8" wafer
3. Treatment : dip deaning(rocking is possible)