RF deposition system - KCIE,1993 |
High Resolution optical signal analysis system control & spectrum analysis - KCIE, 1995 |
Development of slurry supporting equipment - Korea technology finance Co., 1998 |
Study on analysis of conductive and nonconductive materials with RF gas-jet boosted glow discharge emission spectrometer - KCIE, 1998 |
Development of RF sputtering optical analysis system using high resolution multi-channel optic technology - KCIE, 1999 |
Development of high sensitive photo-plasma spectrometry for real-time multi-elemental metal analysis, SMBA, 2001 |
Development of in-situ movable trace element analysis equipment of water with united remote monitoring technology, KCIE, 2001 |
Development of Atomic Emission Optional analysis equipment for Component analysis in Biological Samples, SMBA, 2004 |
Development of semiconductor process gas analyzer - HIT, 2005 |
Development of semiconductor process gas analysis and process monitoring device by inductively coupled plasma emission spectroscopy - HIT, 2006 |
Development of monitoring device for optimization of semiconductor process chamber condition using self-plasma - Small and Medium Business Administration, 2007 |
Development of Process equipment For Solar Cell – HIT 2009 |
Development of Mass production CSD system For Solar Cell – HIT 2010 |
Development of Small & Middle size polishing belt type panel cleaner – HIT 2011 |
Development of Dry cleaner – HIT 2014 |
Development of Rework cleaner – HIT 2017 |
Name of patent (utility model) | Patent No. | Application No. | Registration Year |
---|---|---|---|
Solid samples direct injection apparatus using the RF glow discharge | No.10-0154596호 | 1998 | |
Solid samples direct injection apparatus using a high-frequency glow discharge and a method Glow discharge cell of the spectroscopic analysis system having a cathode ray tube blank |
No.10-0218281호 No.10-0453293호 |
1999 2004 |
|
A mass spectrometry system comprising a sample ionization apparatus using a gas glow discharge |
No.10-0437728호 | 2004 | |
Electrothermal vaporizer | No.10-751884호 | 2007 | |
Sample detection apparatus and the detection method using the same samples using a plasma Solvent removal device and method of using same Plasma deposition method and apparatus therefor |
No.10-06797354호 No.10-0287836호 No.10-0746512호 |
2007 2001 2007 |
|
Plasma devices Miniaturized sample detection apparatus using a plasma |
10-2006-0115052 | 2007 | |
Plasma devices Patent Registration | No.10-0824361호 | 2008 | |
Small Display cleaning equipment | 10-2010-0107692 | 2009 | |
A conveying system for horizontally conveying a flat object and How to use inline dipping |
10-2010-0076417 | 2010 | |
Thin film cleaning equipment | No.10-1310091호 | 2013 | |
Panel cleaning equipment (Steam Pre-Heating System) | No.10-1614423호 | 2016 | |
Cover glass cleaning equipment | 10-2016-110791 | 2016 |