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PRODUCT Wet Equipment Dryer


Y.A.C Mechatronics IPA Vapor Dryer [ IVD ]


· Dry for LSI・MEMS・Power Device manufacturing
· Dry for LED・Solar cell manufacturing
· Dry for Photomask glass substrates manufacturing
· Dry for electric circuit board・parts manufacturing

IVD Features

· World best market share
· Safety design know-how gets from long-time experience and lots of sales
· IPA Vapor dosing tank clean Dry by quartz glass
· Best characteristic; Watermark-less dry
· Optimze for ultrathin wafer which was hard to deal with spin dry technique
· Applicable to wide dry from 3”~12” Si Wafer, Glass board to complicable shape parts
· Applicable to use of Cassette and Cassette-less
· Design from Stand-Alone to In-line by customers' needs