PRODUCT

Maximizing customer satisfaction and strengthening internal R & D
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PRODUCT FPD All Process Equipment

All Process Equipment

HLD-FPS (Large)
· Wet equipment applicable to various processes on Panel surface
· Panel Size : 6G ~ 8G
· Process Direction : Roller (Horizontal & Tilting)
                         : Single & Dual type Air knife
· Chemical Supply : CCSS or LCSS type
· Control method : PC or PLC control

Application field

  • - ITO Etcher
  • - Initial Cleaner
  • - Develop
  • - Pre PI Cleaner
  • - Pre Depo Cleaner
  • - DI Docking