PRODUCT

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PRODUCT LED Lift Off

Lift Off

ECOMA-200 (Lift Off)
· In PR Strip process, lift off unnecessary metal with resist,
  while remaining metal pattern.
· Wafer Size : 4 ~ 6inch
· Chamber : 2ea / 1Floor type (4~8Chamber 구성 가능)
· Chemical Supply : CCSS or LCSS type
· Sub unit : Steam generator / Micro bubbler + DIW unit
· Control method : PC or PLC control / Scheduler control