Direct circulation type chemical isothermal device indispensable for wet process by
contamination free in-line type cooling/heating unit.
Chemical Circulator performs precision temperature control of chemicals used for RCA cleaning
and wet etching. This is widely employed as an element indispensable for the wet process of
semiconductor manufacturing. This Chemical Circulator is newly introduced to meet the needs for
an increase in cleanness along with recent diversification of chemicals and higher megabits.
(Note) For use with high-temperature chemicals, the CS-Heater is recommended.