· Panel WET 설비로 다양한 공정에 대응 가능 하다
· Panel Size : 6G ~ 8G
· Process Direction : Roller (Horizontal & Tilting)
: Single & Dual type Air knife
· Chemical Supply : CCSS or LCSS type
· Control method : PC or PLC control
Application field
- - ITO Etcher
- - Initial Cleaner
- - Develop
- - Pre PI Cleaner
- - Pre Depo Cleaner
- - DI Docking