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KELK
KELK
CS Heater
A compact indirect in-line heater for chemicals-clean, safe and efficient.
The Compact in-line (Clean and Safe) CS-Heater quickly and accurately heats chemicals used for cleaning wafers and stripping resist in semiconductor manufacturing processes.
Designed to heat up chemicals by high-power halogen lamps in high-grade quartz glass tubes through which the chemicals flow. This clean, safe operation leads to chemical contamination free, while assuring high-precision temperature control─advantages that will significantly improve the productivity of your manufacturing process.
The Compact in-line (Clean and Safe) CS-Heater quickly and accurately heats chemicals used for cleaning wafers and stripping resist in semiconductor manufacturing processes.
Designed to heat up chemicals by high-power halogen lamps in high-grade quartz glass tubes through which the chemicals flow. This clean, safe operation leads to chemical contamination free, while assuring high-precision temperature control─advantages that will significantly improve the productivity of your manufacturing process.
Application example
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