PRODUCT
Maximizing customer satisfaction and strengthening internal R & DWe will be a company to pursue.
PRODUCT
Wet Equipment
Dryer
Dryer
Y.A.C Mechatronics IPA Film Dryer [ ＩFD ]
Application
· Dry for LSI・MEMS・Power Device manufacturing
IFD Features
· O₂GAS-LESS inside of dosing tank because processing from wet to dry end in one tank
· Use of low temperature IPA indirecting heated with HOT DIW
· When pass through purity-side, form IPA film on purity-side, DIW → IPA막 → IPA successive substitution
· After IPA film, IPA film → IPA Vapor → IPA condensed substitution by low temperature IPA Vapor
· Since not only give IPA surface tension on wafer, circuit pattern collapse-inhabitable
· Control watermark by IPA Vapor adjusting consistency suitable for wafer side
· Maximize residual particle exclusion effect by IPA film
· Reduce IPA consumption/heater capacity
· Design from Stand-alone to In-line customers' needs
· Use of low temperature IPA indirecting heated with HOT DIW
· When pass through purity-side, form IPA film on purity-side, DIW → IPA막 → IPA successive substitution
· After IPA film, IPA film → IPA Vapor → IPA condensed substitution by low temperature IPA Vapor
· Since not only give IPA surface tension on wafer, circuit pattern collapse-inhabitable
· Control watermark by IPA Vapor adjusting consistency suitable for wafer side
· Maximize residual particle exclusion effect by IPA film
· Reduce IPA consumption/heater capacity
· Design from Stand-alone to In-line customers' needs
